Analysis and Design Principles of MEMS Devices
By (author) Minhang Bao
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Analysis and Design Principles of MEMS Devices by Minhang Bao
Book DescriptionSensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.
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Book DetailsISBN: 9780444516169
(240mm x 165mm x 19mm)
Imprint: Elsevier Science Ltd
Publisher: Elsevier Science & Technology
Publish Date: 6-Apr-2005
Country of Publication: United Kingdom
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