Fundamental Principles of Optical Lithography
The Science of Microfabrication
By (author) Chris A. Mack
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Fundamental Principles of Optical Lithography by Chris A. Mack
Book DescriptionThe fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB(r), to accompany the textbook. You can also contact the author and find help for instructors.
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Book DetailsISBN: 9780470727300
(243mm x 169mm x 31mm)
Publisher: John Wiley and Sons Ltd
Publish Date: 16-Nov-2007
Country of Publication: United States
Books By Author Chris A. Mack
Fundamental Principles of Optical Lithography, Hardback (November 2007)» View all books by Chris A. Mack
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
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