Fundamental Principles of Optical Lithography by Chris A. Mack
Look inside with Google Book Preview
Fundamental Principles of Optical Lithography
By Chris A. Mack

Fundamental Principles of Optical Lithography

The Science of Microfabrication

By (author) See other recent books by Chris A. Mack
Format: Paperback

Normal Price: $117.95
Your Price: $106.16 AUD, inc. GST
Shipping: $7.95 per order
You Save: $11.80! (10% off normal price)
Plus...earn $5.31 in Boomerang Bucks
Availability: Available Available to Backorder, No Due Date for Supply



Fundamental Principles of Optical Lithography by Chris A. Mack

Book Description

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB(r), to accompany the textbook. You can also contact the author and find help for instructors.

Buy Fundamental Principles of Optical Lithography book by Chris A. Mack from Australia's Online Bookstore, Boomerang Books.


Book Details

ISBN: 9780470727300
ISBN-10: 0470727306
Format: Paperback
(243mm x 169mm x 31mm)
Pages: 534
Imprint: Wiley-Blackwell
Publisher: John Wiley and Sons Ltd
Publish Date: 16-Nov-2007
Country of Publication: United States

Other Editions...


Books By Author Chris A. Mack

Fundamental Principles of Optical Lithography by Chris A. Mack Fundamental Principles of Optical Lithography, Hardback (November 2007)

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

» View all books by Chris A. Mack

Reviews

» Have you read this book? We'd like to know what you think about it - write a review about Fundamental Principles of Optical Lithography book by Chris A. Mack and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a member - it's free to sign up!)

Write a book review


Boomerang Bucks close

For every $20 you spend on books, you will receive $1 in Boomerang Bucks loyalty dollars. You can use your Boomerang Bucks as a credit towards a future purchase from Boomerang Books. Note that you must be a Member (free to sign up) and that conditions do apply.

Recent books by Chris A. Mack close
Fundamental Principles of Optical Lithography by Chris A. Mack
»
BoomerangBooks.com.au close