Handbook of Chemicals and Gases for the Semiconductor Industry
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Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra
Book DescriptionThe first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are:Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.
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Book DetailsISBN: 9780471316718
(241mm x 180mm x 22mm)
Imprint: John Wiley & Sons Inc
Publisher: John Wiley and Sons Ltd
Publish Date: 5-Apr-2002
Country of Publication: United States
Books By Author Ashutosh Misra
Pakistan's Stability Paradox, Paperback (September 2013)
This volume highlights and explores the paradoxes that characterise contemporary Pakistan from the simultaneous democratisation and Islamisation of civil society to the schizophrenic US-Pakistan relationship. The central theme of the book looks at Pakistan's stability paradox.
India-Pakistan, Hardback (August 2010)» View all books by Ashutosh Misra
This book is an attempt to dig out the positive aspects of past Indo-Pakistani engagements and explore the relevant lessons to help resolve the current issues and disputes.
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Author Biography - Ashutosh Misra
ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc. JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc. RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC
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