Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra
Look inside with Google Book Preview
Handbook of Chemicals and Gases for the Semiconductor Industry
By Ashutosh Misra

Handbook of Chemicals and Gases for the Semiconductor Industry

By (author) See other recent books by Ashutosh Misra See other recent books by Jeremiah D. Hogan See other recent books by Russell A. Chorush
Format: Hardback

Normal Price: $407.95
Your Price: $367.16 AUD, inc. GST
Shipping: $7.95 per order
You Save: $40.80! (10% off normal price)
Plus...earn $18.36 in Boomerang Bucks
Availability: Available Available to Backorder, No Due Date for Supply



Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra

Book Description

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are:Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Buy Handbook of Chemicals and Gases for the Semiconductor Industry book by Ashutosh Misra from Australia's Online Bookstore, Boomerang Books.


Book Details

ISBN: 9780471316718
ISBN-10: 0471316717
Format: Hardback
(241mm x 180mm x 22mm)
Pages: 364
Imprint: John Wiley & Sons Inc
Publisher: John Wiley and Sons Ltd
Publish Date: 5-Apr-2002
Country of Publication: United States

Books By Author Ashutosh Misra

Pakistan's Stability Paradox by Ashutosh Misra Pakistan's Stability Paradox, Paperback (September 2013)

This volume highlights and explores the paradoxes that characterise contemporary Pakistan from the simultaneous democratisation and Islamisation of civil society to the schizophrenic US-Pakistan relationship. The central theme of the book looks at Pakistan's stability paradox.

India-Pakistan by Ashutosh Misra India-Pakistan, Hardback (August 2010)

This book is an attempt to dig out the positive aspects of past Indo-Pakistani engagements and explore the relevant lessons to help resolve the current issues and disputes.

» View all books by Ashutosh Misra

Reviews

» Have you read this book? We'd like to know what you think about it - write a review about Handbook of Chemicals and Gases for the Semiconductor Industry book by Ashutosh Misra and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a member - it's free to sign up!)

Write a book review


Author Biography - Ashutosh Misra

ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc. JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc. RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC

Boomerang Bucks close

For every $20 you spend on books, you will receive $1 in Boomerang Bucks loyalty dollars. You can use your Boomerang Bucks as a credit towards a future purchase from Boomerang Books. Note that you must be a Member (free to sign up) and that conditions do apply.

Recent books by Ashutosh Misra close
Pakistan's Stability Paradox by Ashutosh Misra
Pakistan's Stability Paradox by Ashutosh Misra
India-Pakistan by Ashutosh Misra
»
Recent books by Jeremiah D. Hogan close
Handbook of Chemicals and Gases for the Semiconductor Industry by Jeremiah D. Hogan
Speciality Gas Analysis by Jeremiah D. Hogan
»
Recent books by Russell A. Chorush close
Handbook of Chemicals and Gases for the Semiconductor Industry by Russell A. Chorush
»
BoomerangBooks.com.au close