Handbook of Silicon Wafer Cleaning Technology
2nd Revised edition
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Handbook of Silicon Wafer Cleaning Technology by Karen A. Reinhardt
Book DescriptionThe second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and photolithography processes. The Handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, residue, and photoresist from wafer surfaces. Both the process and the equipment are covered. A review of the current cleaning technologies is included. Also, advanced cleaning technologies that are under investigation for next generation processing are covered; including supercritical fluid, laser, and cryoaerosol cleaning techniques. Additionally theoretical aspects of the cleaning technologies and how these processes affect the wafer is discussed such as device damage and surface roughening will be discussed. The analysis of the wafers surface is outlined. A discussion of the new materials and the changes required for the surface conditioning process used for manufacturing is also included.
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Book DetailsISBN: 9780815515548
(229mm x 152mm x 42mm)
Imprint: William Andrew Publishing
Publisher: William Andrew Publishing
Publish Date: 21-Feb-2008
Country of Publication: United States
Books By Author Karen A. Reinhardt
Handbook of Cleaning in Semiconductor Manufacturing, Hardback (February 2011)
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.
Weaving Science Inquiry and Continuous Assessment, Paperback (March 2003)» View all books by Karen A. Reinhardt
By combining science inquiry and continuous assessment, you will not only catalyze meaningful changes in your students' thinking and learning, but also reflect on and enhance your own approach to teaching.
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Author Biography - Karen A. Reinhardt
Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. At Cameo Consulting she assists companies investigating and assessing new and unique cleaning technologies that will allow realization of the ITRS roadmap with respect to smaller geometries, new materials, and the environmental issues associated with current cleaning processes. Karen has published over 30 technical papers ranging from plasma processing to damage characterization and cleaning technology assessment. She has been awarded eight patents. Karen formerly co-chaired the ITRS Surface Preparation Technical Working Group. Prior to forming a contracting and consulting company, Karen was employed at Novellus Systems and Advanced Micro Devices. Karen has a BS degree in Chemistry from the University of California at Riverside and a MS degree in Inorganic Chemistry from Texas Tech University.
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