Introduction to Microlithography
2nd Revised edition
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Introduction to Microlithography by L. F. Thompson
Book DescriptionUpdated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Book DetailsISBN: 9780841228481
(236mm x 158mm x 34mm)
Imprint: American Chemical Society
Publisher: American Chemical Society
Publish Date: 1-Jan-1994
Country of Publication: United States
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