And Other Fabrication Techniques for 3D MEMS
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Microstereolithography by Vijay K. Varadan
Book DescriptionThis timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: a unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques; coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units; and insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. It describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers. This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
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Book DetailsISBN: 9780471521853
(233mm x 161mm x 20mm)
Imprint: John Wiley & Sons Ltd
Publisher: John Wiley and Sons Ltd
Publish Date: 29-Jan-2001
Country of Publication: United Kingdom
Books By Author Vijay K. Varadan
Nanoscience and Nanotechnology in Engineering, Hardback (October 2009)
The usage of nanoscience and nanotechnology in engineering directly links academic research in the above two fields of nanoscience and nanotechnology to industries. This book provides the theoretical knowledge and important experimental techniques required for the research and development on nanoscience and nanotechnology in engineering.
Nanomedicine, Hardback (November 2008)
One of the only books designed for novices, researchers, and professionals, Functional Magnetic Nanomaterials for Biomedical Applications provides a comprehensive and systematic analysis of the magnetic properties of various types of functional materials, including magnetic composites, nanomaterials, and intrinsically smart materials.
RF MEMS and Their Applications, Hardback (October 2002)
Microelectromechanical systems (MEMS) refer to a collection of micro sensors and actuators, which can react to environmental change under micro circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. This work covers this topic.
Microsensors, MEMS and Smart Devices, Hardback (November 2001)» View all books by Vijay K. Varadan
From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.
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