Plasma Etching by Minoru Sugawara
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Plasma Etching
By Minoru Sugawara

Plasma Etching

Fundamentals and Applications

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Format: Hardback

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Plasma Etching by Minoru Sugawara

Book Description

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

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Book Details

ISBN: 9780198562870
ISBN-10: 019856287X
Format: Hardback
(242mm x 163mm x 23mm)
Pages: 356
Imprint: Oxford University Press
Publisher: Oxford University Press
Publish Date: 28-May-1998
Country of Publication: United Kingdom


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Author Biography - Minoru Sugawara

Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430

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