Silicon Micromachining by M. Elwenspoek
Look inside with Google Book Preview
Silicon Micromachining
By M. Elwenspoek

Silicon Micromachining

By (author) See other recent books by M. Elwenspoek See other recent books by H.V. Jansen
Series edited by Haroon Ahmad See other recent books by Haroon Ahmad
Format: Paperback

Normal Price: $145.00
Your Price: $130.50 AUD, inc. GST
Shipping: $7.95 per order
You Save: $14.50! (10% off normal price)
Plus...earn $6.52 in Boomerang Bucks
Availability: Available Available to Backorder, No Due Date for Supply



Silicon Micromachining by M. Elwenspoek

Book Description

This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and miniature robots. The authors underpin the discussion of each technique with a brief review of the fundamental physical and chemical principles involved. They pay particular attention to methods such as isotropic and anisotropic wet chemical etching, wafer bonding, reactive ion etching, and surface micromachining. There is a special section on bulk micromachining, and the authors also discuss release mechanisms for movable microstructures. The book is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).

Buy Silicon Micromachining book by M. Elwenspoek from Australia's Online Bookstore, Boomerang Books.


Book Details

ISBN: 9780521607674
ISBN-10: 0521607671
Format: Paperback
(253mm x 177mm x 22mm)
Pages: 420
Imprint: Cambridge University Press
Publisher: Cambridge University Press
Publish Date: 19-Aug-2004
Country of Publication: United Kingdom

Other Editions...


Reviews

» Have you read this book? We'd like to know what you think about it - write a review about Silicon Micromachining book by M. Elwenspoek and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a member - it's free to sign up!)

Write a book review


Boomerang Bucks close

For every $20 you spend on books, you will receive $1 in Boomerang Bucks loyalty dollars. You can use your Boomerang Bucks as a credit towards a future purchase from Boomerang Books. Note that you must be a Member (free to sign up) and that conditions do apply.

Recent books by M. Elwenspoek close
»
Recent books by H.V. Jansen close
Silicon Micromachining by H.V. Jansen
»
Recent books by Haroon Ahmad close
Photo-induced Defects in Semiconductors by Haroon Ahmad
Plasma Processes for Semiconductor Fabrication by Haroon Ahmad
Doping in III-V Semiconductors by Haroon Ahmad
Silicon Micromachining by Haroon Ahmad
Electronic Transport in Mesoscopic Systems by Haroon Ahmad
Physics and Applications of Resonant Tunnelling Diodes by Haroon Ahmad
Doping in III-V Semiconductors by Haroon Ahmad
»
BoomerangBooks.com.au close