Soft X-Rays and Extreme Ultraviolet Radiation by David Attwood
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Soft X-Rays and Extreme Ultraviolet Radiation
By David Attwood

Soft X-Rays and Extreme Ultraviolet Radiation

Principles and Applications

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Format: Paperback

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Soft X-Rays and Extreme Ultraviolet Radiation by David Attwood

Book Description

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

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Book Details

ISBN: 9780521029971
ISBN-10: 052102997X
Format: Paperback
(253mm x 177mm x 26mm)
Pages: 504
Imprint: Cambridge University Press
Publisher: Cambridge University Press
Publish Date: 22-Feb-2007
Country of Publication: United Kingdom

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