Soft X-Rays and Extreme Ultraviolet Radiation
Principles and Applications
By (author) David Attwood
Soft X-Rays and Extreme Ultraviolet Radiation by David Attwood
Book DescriptionThis detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Buy Soft X-Rays and Extreme Ultraviolet Radiation book by David Attwood from Australia's Online Bookstore, Boomerang Books.
Book DetailsISBN: 9780521029971
(253mm x 177mm x 26mm)
Imprint: Cambridge University Press
Publisher: Cambridge University Press
Publish Date: 22-Feb-2007
Country of Publication: United Kingdom
Books By Author David Attwood
X-Rays and Extreme Ultraviolet Radiation, Hardback (December 2016)» View all books by David Attwood
Master the physics and understand the current applications of modern X-ray and EUV sources with this fully updated second edition.
» Have you read this book? We'd like to know what you think about it - write a review about Soft X-Rays and Extreme Ultraviolet Radiation book by David Attwood and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a member - it's free to sign up!)
Phone: 1300 36 33 32 (9am-5pm Mon-Fri AEST) - International: +61 2 9960 7998 - Online Form
Address: Boomerang Books, 878 Military Road, Mosman Junction, NSW, 2088
© 2003-2017. All Rights Reserved. Eclipse Commerce Pty Ltd - ACN: 122 110 687 - ABN: 49 122 110 687