A User's Guide to Ellipsometry
By (author) Harland G. Tompkins
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User's Guide to Ellipsometry by Harland G. Tompkins
Book DescriptionThis text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.
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Book DetailsISBN: 9780486450285
(216mm x 143mm x 14mm)
Imprint: Dover Publications Inc.
Publisher: Dover Publications Inc.
Publish Date: 24-Nov-2006
Country of Publication: United States
Books By Author Harland G. Tompkins
Spectroscopic Ellipsometry and Reflectometry, Hardback (April 1999)» View all books by Harland G. Tompkins
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.
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