Description - Plasma Etching by Minoru Sugawara
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
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(242mm x 163mm x 23mm)
Oxford University Press
Publisher: Oxford University Press
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Book Reviews - Plasma Etching by Minoru Sugawara
Author Biography - Minoru Sugawara
Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430