The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Buy Plasma Etching book by Minoru Sugawara from Australia's Online Bookstore, Boomerang Books.
(242mm x 163mm x 23mm)
Oxford University Press
Publisher: Oxford University Press
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Author Biography - Minoru Sugawara
Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430