Call Boomerang Books 1300 36 33 32

Description - Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are:Thin Film Deposition MaterialsWafer Cleaning MaterialsPhotolithography MaterialsWet and Dry Etching MaterialsChemical Mechanical Planarizing MethodsCarrier GasesUncategorized MaterialsSemiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Buy Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra from Australia's Online Independent Bookstore, Boomerang Books.

Book Details

ISBN: 9780471316718
ISBN-10: 0471316717
Format: Hardback
Pages: 364
Imprint: John Wiley & Sons Inc
Publisher: John Wiley and Sons Ltd
Publish Date: 22-Mar-2002
Country of Publication: United States

Book Reviews - Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra

» Have you read this book? We'd like to know what you think about it - write a review about Handbook of Chemicals and Gases for the Semiconductor Industry book by Ashutosh Misra and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a Boomerang Books Account Holder - it's free to sign up and there are great benefits!)

Write Review


Author Biography - Ashutosh Misra

ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc. JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc. RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC

Books By Ashutosh Misra

Pakistan's Stability Paradox by Ashutosh Misra
Paperback, October 2013
$61.19