1300 36 33 32

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: a unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques; coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units; and insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. It describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers. This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.

Buy Microstereolithography book by Vijay K. Varadan from Australia's Online Bookstore, Boomerang Books.

Book Details

ISBN: 9780471521853
ISBN-10: 047152185X
Format: Hardback
(233mm x 161mm x 20mm)
Pages: 274
Imprint: John Wiley & Sons Ltd
Publisher: John Wiley and Sons Ltd
Publish Date: 29-Jan-2001
Country of Publication: United Kingdom

Reviews

» Have you read this book? We'd like to know what you think about it - write a review about Microstereolithography book by Vijay K. Varadan and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a member - it's free to sign up!)

Write Review


Books By Author Vijay K. Varadan

Nanoscience and Nanotechnology in Engineering by Vijay K. Varadan

Nanoscience and Nanotechnology in Engineering

Hardback, October 2009
$107.10
Nanomedicine by Vijay K. Varadan

Nanomedicine

Hardback, November 2008
$222.26
RF MEMS and Their Applications by Vijay K. Varadan

RF MEMS and Their Applications

Hardback, October 2002
$260.96
Microsensors, MEMS and Smart Devices by Vijay K. Varadan

Microsensors, MEMS and Smart Devices

Hardback, November 2001
$214.16