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Description - Basic Vacuum Technology by Austin Chambers

An introductory text on how to use vacuum techniques. It provides a grounding in the basic scientific principles and concepts which underlie the production and measurement of vacua. This edition includes more worked examples, more information on basic gas properties, and an expanded approach to changed needs in vacuum applications in semiconductor processing.

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Book Details

ISBN: 9780750304955
ISBN-10: 0750304952
Format: Hardback
(246mm x 174mm x 12mm)
Pages: 100
Imprint: Institute of Physics Publishing
Publisher: Taylor & Francis Ltd
Publish Date: 1-Jan-1998
Country of Publication: United Kingdom

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