Description - Basic Vacuum Technology by Austin Chambers
An introductory text on how to use vacuum techniques. It provides a grounding in the basic scientific principles and concepts which underlie the production and measurement of vacua. This edition includes more worked examples, more information on basic gas properties, and an expanded approach to changed needs in vacuum applications in semiconductor processing.
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(246mm x 174mm x 12mm)
Institute of Physics Publishing
Publisher: Taylor & Francis Ltd
Country of Publication:
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