Call Boomerang Books 1300 36 33 32

Get Latest Book News + FREE Shipping. Subscribe to the Boomerang Books Bulletin eNewsletter right now!

Description - Introduction to Microlithography by L. F. Thompson

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

Buy Introduction to Microlithography by L. F. Thompson from Australia's Online Independent Bookstore, Boomerang Books.

Book Details

ISBN: 9780841228481
ISBN-10: 0841228485
Format: Hardback
(236mm x 158mm x 34mm)
Pages: 540
Imprint: American Chemical Society
Publisher: American Chemical Society
Publish Date: 1-Jan-1994
Country of Publication: United States

Book Reviews - Introduction to Microlithography by L. F. Thompson

» Have you read this book? We'd like to know what you think about it - write a review about Introduction to Microlithography book by L. F. Thompson and you'll earn 50c in Boomerang Bucks loyalty dollars (you must be a Boomerang Books Account Holder - it's free to sign up and there are great benefits!)

Write Review