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Description - Introduction to Microlithography by Larry F. Thompson

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Book Details

ISBN: 9780841228481
ISBN-10: 0841228485
Format: Hardback
(236mm x 158mm x 34mm)
Pages: 540
Imprint: American Chemical Society
Publisher: American Chemical Society
Publish Date: 1-Jan-1994
Country of Publication: United States

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